Gabriella Ghidini, Daniele Merlini, Massimiliano Cannavo, Maria Luisa Polignano, Isabella Mica, Amos Galbiati, Lucia Zullino, Riccardo Turconi, Salvatore Grasso, Maurizio Moroni, Davide Codegoni. H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks. In 45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015. pages 294-297, IEEE, 2015. [doi]
Abstract is missing.