Sigma - Delta inspired control technique for the improvement of MEMS reliability

Panagiotis Giounanlis, Elena Blokhina, Orla Feely, Sergi Gorreta, Joan Pons-Nin, Manuel Domínguez. Sigma - Delta inspired control technique for the improvement of MEMS reliability. In IEEE International Symposium on Circuits and Systemss, ISCAS 2014, Melbourne, Victoria, Australia, June 1-5, 2014. pages 1243-1246, IEEE, 2014. [doi]

Abstract

Abstract is missing.