Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask

Simon Chun Kiat Goh, Li Lynn Shiau, Nan Chen, Kailiang Chuan, Beng Kang Tay, Chuan Seng Tan. Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 652-655, IEEE, 2018. [doi]

@inproceedings{GohSCCTT18,
  title = {Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask},
  author = {Simon Chun Kiat Goh and Li Lynn Shiau and Nan Chen and Kailiang Chuan and Beng Kang Tay and Chuan Seng Tan},
  year = {2018},
  doi = {10.1109/NEMS.2018.8556967},
  url = {https://doi.org/10.1109/NEMS.2018.8556967},
  researchr = {https://researchr.org/publication/GohSCCTT18},
  cites = {0},
  citedby = {0},
  pages = {652-655},
  booktitle = {13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-5273-2},
}