Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask

Simon Chun Kiat Goh, Li Lynn Shiau, Nan Chen, Kailiang Chuan, Beng Kang Tay, Chuan Seng Tan. Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 652-655, IEEE, 2018. [doi]

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