Planar fabrication of a mesoscale voice coil actuator - researchr publication authors

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Benjamin Goldberg, Michael Karpelson, Onur Özcan, Robert J. Wood. Planar fabrication of a mesoscale voice coil actuator. In 2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014. pages 6319-6325, IEEE, 2014. [doi]

This author has not been identified. Look up 'Benjamin Goldberg' in GoogleThis author has not been identified. Look up 'Michael Karpelson' in GoogleThis author has not been identified. Look up 'Onur Özcan' in GoogleThis author has not been identified. Look up 'Robert J. Wood' in Google

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