Planar fabrication of a mesoscale voice coil actuator

Benjamin Goldberg, Michael Karpelson, Onur Özcan, Robert J. Wood. Planar fabrication of a mesoscale voice coil actuator. In 2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014. pages 6319-6325, IEEE, 2014. [doi]

Abstract

Abstract is missing.