Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques

V. Gonda, K. M. B. Jansen, L. J. Ernst, J. den Toonder, G. Q. Zhang. Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. Microelectronics Reliability, 47(2-3):248-251, 2007. [doi]

Abstract

Abstract is missing.