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Experimental-model-based precision control of a piezoelectric actuated flexure stage

Zhiming Gong, Edwin Hui Leong Ho, Guilin Yang, Wei Lin 0002. Experimental-model-based precision control of a piezoelectric actuated flexure stage. In IEEE International Conference on Automation Science and Engineering, CASE 2005, Edmonton, Alberta, Canada, August 1-2, 2005. pages 124-129, IEEE, 2005. [doi]

Authors

Zhiming Gong

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Edwin Hui Leong Ho

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Guilin Yang

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Wei Lin 0002

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