Experimental-model-based precision control of a piezoelectric actuated flexure stage

Zhiming Gong, Edwin Hui Leong Ho, Guilin Yang, Wei Lin 0002. Experimental-model-based precision control of a piezoelectric actuated flexure stage. In IEEE International Conference on Automation Science and Engineering, CASE 2005, Edmonton, Alberta, Canada, August 1-2, 2005. pages 124-129, IEEE, 2005. [doi]

Abstract

Abstract is missing.