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Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence

Wolfgang Gös, Yannick Wimmer, A.-M. El-Sayed, G. Rzepa, Markus Jech, A. L. Shluger, Tibor Grasser. Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence. Microelectronics Reliability, 87:286-320, 2018. [doi]

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