Electron Beam Prober for LSI Testing with 100ps Time Resolution

Y. Goto, K. Ozaki, T. Ishizuka, A. Ito, Y. Furukawa, T. Inagaki. Electron Beam Prober for LSI Testing with 100ps Time Resolution. In Proceedings International Test Conference 1984, Philadelphia, PA, USA, October 1984. pages 543-549, IEEE Computer Society, 1984.

@inproceedings{GotoOIIFI84,
  title = {Electron Beam Prober for LSI Testing with 100ps Time Resolution},
  author = {Y. Goto and K. Ozaki and T. Ishizuka and A. Ito and Y. Furukawa and T. Inagaki},
  year = {1984},
  tags = {testing},
  researchr = {https://researchr.org/publication/GotoOIIFI84},
  cites = {0},
  citedby = {0},
  pages = {543-549},
  booktitle = {Proceedings International Test Conference 1984, Philadelphia, PA, USA, October 1984},
  publisher = {IEEE Computer Society},
}