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Electron Beam Prober for LSI Testing with 100ps Time Resolution

Y. Goto, K. Ozaki, T. Ishizuka, A. Ito, Y. Furukawa, T. Inagaki. Electron Beam Prober for LSI Testing with 100ps Time Resolution. In Proceedings International Test Conference 1984, Philadelphia, PA, USA, October 1984. pages 543-549, IEEE Computer Society, 1984.

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