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Comparison of thermoreflectance and scanning thermal microscopy for microelectronic device temperature variation imaging: Calibration and resolution issues

Stéphane Grauby, M. Amine Salhi, Luis David Patiño Lopez, Wilfrid Claeys, Benoît Charlot, Stefan Dilhaire. Comparison of thermoreflectance and scanning thermal microscopy for microelectronic device temperature variation imaging: Calibration and resolution issues. Microelectronics Reliability, 48(2):204-211, 2008. [doi]

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