Reliability assessment of hafnia-based ferroelectric devices and arrays for memory and AI applications (Invited)

Laurent Grenouillet, Justine Barbot, J. Laguerre, Simon Martin 0006, Catherine Carabasse, M. Louro, Messaoud Bedjaoui, S. Minoret, S. Kerdilès, C. Boixaderas, T. Magis, Carine Jahan, François Andrieu, Jean Coignus. Reliability assessment of hafnia-based ferroelectric devices and arrays for memory and AI applications (Invited). In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-8, IEEE, 2023. [doi]

Abstract

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