Distribution optimization of thermal through-silicon via for 3D chip based on thermal-mechanic coupling

Xiaonan Guan, Kun Xi, Zhihui Xie, Jian Zhang, Zhuoqun Lu, Yanlin Ge. Distribution optimization of thermal through-silicon via for 3D chip based on thermal-mechanic coupling. Microelectronics Journal, 134:105723, April 2023. [doi]

Abstract

Abstract is missing.