Roberto Guerrieri, Karim H. Tadros, John K. Gamelin, Andrew R. Neureuther. Massively parallel algorithms for scattering in optical lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 10(9):1091-1100, 1991. [doi]
@article{GuerrieriTGN91,
title = {Massively parallel algorithms for scattering in optical lithography},
author = {Roberto Guerrieri and Karim H. Tadros and John K. Gamelin and Andrew R. Neureuther},
year = {1991},
doi = {10.1109/43.85755},
url = {http://doi.ieeecomputersociety.org/10.1109/43.85755},
researchr = {https://researchr.org/publication/GuerrieriTGN91},
cites = {0},
citedby = {0},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
volume = {10},
number = {9},
pages = {1091-1100},
}