W. J. Guillaume, A. Kurylo. MINUPROX - an advanced proximity correction technique for the IBM EL-2 electron beam tool. In Patricia H. Lambert, Hillel Ofek, Lawrence A. O'Neill, Pat O. Pistilli, Paul Losleben, J. D. Nash, Dennis W. Shaklee, Bryan T. Preas, Harvey N. Lerman, editors, Proceedings of the 21st Design Automation Conference, DAC '84, Albuquerque, New Mexico, June 25-27, 1984. pages 452-453, ACM/IEEE, 1984. [doi]
@inproceedings{GuillaumeK84,
title = {MINUPROX - an advanced proximity correction technique for the IBM EL-2 electron beam tool},
author = {W. J. Guillaume and A. Kurylo},
year = {1984},
url = {http://dl.acm.org/citation.cfm?id=800837},
researchr = {https://researchr.org/publication/GuillaumeK84},
cites = {0},
citedby = {0},
pages = {452-453},
booktitle = {Proceedings of the 21st Design Automation Conference, DAC '84, Albuquerque, New Mexico, June 25-27, 1984},
editor = {Patricia H. Lambert and Hillel Ofek and Lawrence A. O'Neill and Pat O. Pistilli and Paul Losleben and J. D. Nash and Dennis W. Shaklee and Bryan T. Preas and Harvey N. Lerman},
publisher = {ACM/IEEE},
isbn = {0-8186-0542-1},
}