W. J. Guillaume, A. Kurylo. MINUPROX - an advanced proximity correction technique for the IBM EL-2 electron beam tool. In Patricia H. Lambert, Hillel Ofek, Lawrence A. O'Neill, Pat O. Pistilli, Paul Losleben, J. D. Nash, Dennis W. Shaklee, Bryan T. Preas, Harvey N. Lerman, editors, Proceedings of the 21st Design Automation Conference, DAC '84, Albuquerque, New Mexico, June 25-27, 1984. pages 452-453, ACM/IEEE, 1984. [doi]
Abstract is missing.