A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

Ying Guo, Bo Li, Qi Zhang, Xiao-Ting He, Jun-Yi Sun. A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration. Sensors, 22(8):2848, 2022. [doi]

Authors

Ying Guo

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Bo Li

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Qi Zhang

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Xiao-Ting He

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Jun-Yi Sun

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