A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

Ying Guo, Bo Li, Qi Zhang, Xiao-Ting He, Jun-Yi Sun. A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration. Sensors, 22(8):2848, 2022. [doi]

Abstract

Abstract is missing.