A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

Ying Guo, Bo Li, Qi Zhang, Xiao-Ting He, Jun-Yi Sun. A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration. Sensors, 22(8):2848, 2022. [doi]

@article{GuoLZHS22,
  title = {A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration},
  author = {Ying Guo and Bo Li and Qi Zhang and Xiao-Ting He and Jun-Yi Sun},
  year = {2022},
  doi = {10.3390/s22082848},
  url = {https://doi.org/10.3390/s22082848},
  researchr = {https://researchr.org/publication/GuoLZHS22},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {22},
  number = {8},
  pages = {2848},
}