Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography

Mohit Gupta, Kwangok Jeong, Andrew B. Kahng. Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 29(8):1229-1242, 2010. [doi]

@article{GuptaJK10,
  title = {Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography},
  author = {Mohit Gupta and Kwangok Jeong and Andrew B. Kahng},
  year = {2010},
  doi = {10.1109/TCAD.2010.2049041},
  url = {http://dx.doi.org/10.1109/TCAD.2010.2049041},
  tags = {context-aware},
  researchr = {https://researchr.org/publication/GuptaJK10},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {29},
  number = {8},
  pages = {1229-1242},
}