Growth and characterization of ultrathin nitrided silicon oxide films

Evgeni P. Gusev, Hsu-Chang Lu, Eric L. Garfunkel, Torgny Gustafsson, Martin L. Green. Growth and characterization of ultrathin nitrided silicon oxide films. IBM Journal of Research and Development, 43(3):265-286, 1999. [doi]

Abstract

Abstract is missing.