Development of high accuracy of magnetic levitation transport system for OLED evaporation process

Chang-Wan Ha, Chang-Hyun Kim, Jaewon Lim. Development of high accuracy of magnetic levitation transport system for OLED evaporation process. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 1334-1339, IEEE, 2017. [doi]

Authors

Chang-Wan Ha

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Chang-Hyun Kim

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Jaewon Lim

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