Development of high accuracy of magnetic levitation transport system for OLED evaporation process

Chang-Wan Ha, Chang-Hyun Kim, Jaewon Lim. Development of high accuracy of magnetic levitation transport system for OLED evaporation process. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 1334-1339, IEEE, 2017. [doi]

@inproceedings{HaKL17-1,
  title = {Development of high accuracy of magnetic levitation transport system for OLED evaporation process},
  author = {Chang-Wan Ha and Chang-Hyun Kim and Jaewon Lim},
  year = {2017},
  doi = {10.1109/AIM.2017.8014203},
  url = {https://doi.org/10.1109/AIM.2017.8014203},
  researchr = {https://researchr.org/publication/HaKL17-1},
  cites = {0},
  citedby = {0},
  pages = {1334-1339},
  booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-6000-9},
}