High-precision spiral positioning control of a piezoelectric tube scanner used in an atomic force microscope

Habibullah, Hemanshu Roy Pota, Ian R. Petersen. High-precision spiral positioning control of a piezoelectric tube scanner used in an atomic force microscope. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 1625-1630, IEEE, 2014. [doi]

Authors

Habibullah

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Hemanshu Roy Pota

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Ian R. Petersen

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