Axel Hald, Pekka Herzogenrath, Jürgen Scheible, Jens Lienig, Johannes Seelhorst, Peter Brandl. Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. Integration, 63:362-372, 2018. [doi]
@article{HaldHSLSB18,
title = {Full custom MEMS design: A new method for the analysis of motion-dependent parasitics},
author = {Axel Hald and Pekka Herzogenrath and Jürgen Scheible and Jens Lienig and Johannes Seelhorst and Peter Brandl},
year = {2018},
doi = {10.1016/j.vlsi.2018.02.004},
url = {https://doi.org/10.1016/j.vlsi.2018.02.004},
researchr = {https://researchr.org/publication/HaldHSLSB18},
cites = {0},
citedby = {0},
journal = {Integration},
volume = {63},
pages = {362-372},
}