Full custom MEMS design: A new method for the analysis of motion-dependent parasitics

Axel Hald, Pekka Herzogenrath, Jürgen Scheible, Jens Lienig, Johannes Seelhorst, Peter Brandl. Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. Integration, 63:362-372, 2018. [doi]

Abstract

Abstract is missing.