Polycrystalline silicon wafer defect segmentation based on deep convolutional neural networks

Hui Han, Chenqiang Gao, Yue Zhao, Shisha Liao, Lin Tang, Xindou Li. Polycrystalline silicon wafer defect segmentation based on deep convolutional neural networks. Pattern Recognition Letters, 130:234-241, 2020. [doi]

Authors

Hui Han

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Chenqiang Gao

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Yue Zhao

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Shisha Liao

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Lin Tang

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Xindou Li

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