Polycrystalline silicon wafer defect segmentation based on deep convolutional neural networks

Hui Han, Chenqiang Gao, Yue Zhao, Shisha Liao, Lin Tang, Xindou Li. Polycrystalline silicon wafer defect segmentation based on deep convolutional neural networks. Pattern Recognition Letters, 130:234-241, 2020. [doi]

@article{HanGZLTL20,
  title = {Polycrystalline silicon wafer defect segmentation based on deep convolutional neural networks},
  author = {Hui Han and Chenqiang Gao and Yue Zhao and Shisha Liao and Lin Tang and Xindou Li},
  year = {2020},
  doi = {10.1016/j.patrec.2018.12.013},
  url = {https://doi.org/10.1016/j.patrec.2018.12.013},
  researchr = {https://researchr.org/publication/HanGZLTL20},
  cites = {0},
  citedby = {0},
  journal = {Pattern Recognition Letters},
  volume = {130},
  pages = {234-241},
}