Hideki Hashimoto, Kwee-Bo Sim, Hiroyuki Fujita, Fumio Harashima. Servo Controller For Electrostatic Micro-actuators. In IEEE International Workshop on Intelligent Robots and Systems '88, Proceedings. IROS 1988, Tokyo, Japan, October 31 - November 2, 1988. pages 21-26, IEEE, 1988. [doi]
Abstract is missing.