Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process - researchr publication authors

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Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang 0087, Dacheng Zhang. Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 568-571, IEEE, 2014. [doi]

This author has not been identified. Look up 'Jun He' in GoogleThis author has not been identified. Look up 'Xian Huang' in GoogleThis author has not been identified. Look up 'Li Zhang' in GoogleThis author has not been identified. Look up 'Danqi Zhao' in GoogleThis author has not been identified. Look up 'Fang Yang' in GoogleThis author has not been identified. Look up 'Wei Wang 0087' in GoogleThis author has not been identified. Look up 'Dacheng Zhang' in Google

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