Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process

Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang 0087, Dacheng Zhang. Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 568-571, IEEE, 2014. [doi]

Abstract

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