Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang 0087, Dacheng Zhang. Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 568-571, IEEE, 2014. [doi]
@inproceedings{HeHZZYWZ14,
title = {Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process},
author = {Jun He and Xian Huang and Li Zhang and Danqi Zhao and Fang Yang and Wei Wang 0087 and Dacheng Zhang},
year = {2014},
doi = {10.1109/NEMS.2014.6908876},
url = {https://doi.org/10.1109/NEMS.2014.6908876},
researchr = {https://researchr.org/publication/HeHZZYWZ14},
cites = {0},
citedby = {0},
pages = {568-571},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}