Rapid synthesis of MEMS devices based on element model library and metamodel

Yang He, Chengyu Jiang, Kai-Leung Yung, Yan Xu, Weizheng Yuan. Rapid synthesis of MEMS devices based on element model library and metamodel. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 301-305, IEEE, 2010. [doi]

Authors

Yang He

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Chengyu Jiang

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Kai-Leung Yung

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Yan Xu

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Weizheng Yuan

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