Rapid synthesis of MEMS devices based on element model library and metamodel

Yang He, Chengyu Jiang, Kai-Leung Yung, Yan Xu, Weizheng Yuan. Rapid synthesis of MEMS devices based on element model library and metamodel. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 301-305, IEEE, 2010. [doi]

@inproceedings{HeJYXY10,
  title = {Rapid synthesis of MEMS devices based on element model library and metamodel},
  author = {Yang He and Chengyu Jiang and Kai-Leung Yung and Yan Xu and Weizheng Yuan},
  year = {2010},
  doi = {10.1109/NEMS.2010.5592221},
  url = {http://dx.doi.org/10.1109/NEMS.2010.5592221},
  researchr = {https://researchr.org/publication/HeJYXY10},
  cites = {0},
  citedby = {0},
  pages = {301-305},
  booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
  publisher = {IEEE},
}