Yang He, Chengyu Jiang, Kai-Leung Yung, Yan Xu, Weizheng Yuan. Rapid synthesis of MEMS devices based on element model library and metamodel. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 301-305, IEEE, 2010. [doi]
Abstract is missing.