A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale

Sifeng He, Hui Tang 0003, Kaifu Zhang, Chuangbin Chen, Jianglin Wang, Zhongyuan Zhu, Jian Gao 0002, Chengqiang Cui, Xin Chen 0005. A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale. IEEE Transactions on Industrial Electronics, 68(3):2345-2355, 2021. [doi]

Authors

Sifeng He

This author has not been identified. Look up 'Sifeng He' in Google

Hui Tang 0003

This author has not been identified. Look up 'Hui Tang 0003' in Google

Kaifu Zhang

This author has not been identified. Look up 'Kaifu Zhang' in Google

Chuangbin Chen

This author has not been identified. Look up 'Chuangbin Chen' in Google

Jianglin Wang

This author has not been identified. Look up 'Jianglin Wang' in Google

Zhongyuan Zhu

This author has not been identified. Look up 'Zhongyuan Zhu' in Google

Jian Gao 0002

This author has not been identified. Look up 'Jian Gao 0002' in Google

Chengqiang Cui

This author has not been identified. Look up 'Chengqiang Cui' in Google

Xin Chen 0005

This author has not been identified. Look up 'Xin Chen 0005' in Google