Sifeng He, Hui Tang 0003, Kaifu Zhang, Chuangbin Chen, Jianglin Wang, Zhongyuan Zhu, Jian Gao 0002, Chengqiang Cui, Xin Chen 0005. A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale. IEEE Transactions on Industrial Electronics, 68(3):2345-2355, 2021. [doi]
Abstract is missing.