Sifeng He, Hui Tang 0003, Kaifu Zhang, Chuangbin Chen, Jianglin Wang, Zhongyuan Zhu, Jian Gao 0002, Chengqiang Cui, Xin Chen 0005. A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale. IEEE Transactions on Industrial Electronics, 68(3):2345-2355, 2021. [doi]
@article{HeTZCWZGCC21,
title = {A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale},
author = {Sifeng He and Hui Tang 0003 and Kaifu Zhang and Chuangbin Chen and Jianglin Wang and Zhongyuan Zhu and Jian Gao 0002 and Chengqiang Cui and Xin Chen 0005},
year = {2021},
doi = {10.1109/TIE.2020.2973882},
url = {https://doi.org/10.1109/TIE.2020.2973882},
researchr = {https://researchr.org/publication/HeTZCWZGCC21},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Industrial Electronics},
volume = {68},
number = {3},
pages = {2345-2355},
}