Xinyu He, Daohui Wang, Shujing Lyu, Pourya Shamsolmoali, Jiwei Shen, Yue Lu 0001. LithoMamba: High-fidelity lithography simulation with State Space Models. In Design, Automation & Test in Europe Conference, DATE 2026, Verona, Italy, April 20-22, 2026. pages 1-6, IEEE, 2026. [doi]
@inproceedings{HeWLSSL26,
title = {LithoMamba: High-fidelity lithography simulation with State Space Models},
author = {Xinyu He and Daohui Wang and Shujing Lyu and Pourya Shamsolmoali and Jiwei Shen and Yue Lu 0001},
year = {2026},
doi = {10.23919/DATE69613.2026.11539705},
url = {https://doi.org/10.23919/DATE69613.2026.11539705},
researchr = {https://researchr.org/publication/HeWLSSL26},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {Design, Automation & Test in Europe Conference, DATE 2026, Verona, Italy, April 20-22, 2026},
publisher = {IEEE},
isbn = {978-3-9826741-1-7},
}