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LithoMamba: High-fidelity lithography simulation with State Space Models

Xinyu He, Daohui Wang, Shujing Lyu, Pourya Shamsolmoali, Jiwei Shen, Yue Lu 0001. LithoMamba: High-fidelity lithography simulation with State Space Models. In Design, Automation & Test in Europe Conference, DATE 2026, Verona, Italy, April 20-22, 2026. pages 1-6, IEEE, 2026. [doi]

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