Marcel François Heertjes, Hans Butler, N. J. Dirkx, S. H. van der Meulen, R. Ahlawat, K. O'Brien, J. Simonelli, K.-T. Teng, Y. Zhao. Control of Wafer Scanners: Methods and Developments. In 2020 American Control Conference, ACC 2020, Denver, CO, USA, July 1-3, 2020. pages 3686-3703, IEEE, 2020. [doi]
@inproceedings{HeertjesBDMAOST20,
title = {Control of Wafer Scanners: Methods and Developments},
author = {Marcel François Heertjes and Hans Butler and N. J. Dirkx and S. H. van der Meulen and R. Ahlawat and K. O'Brien and J. Simonelli and K.-T. Teng and Y. Zhao},
year = {2020},
doi = {10.23919/ACC45564.2020.9147464},
url = {https://doi.org/10.23919/ACC45564.2020.9147464},
researchr = {https://researchr.org/publication/HeertjesBDMAOST20},
cites = {0},
citedby = {0},
pages = {3686-3703},
booktitle = {2020 American Control Conference, ACC 2020, Denver, CO, USA, July 1-3, 2020},
publisher = {IEEE},
isbn = {978-1-5386-8266-1},
}