Marcel François Heertjes, Hans Butler, N. J. Dirkx, S. H. van der Meulen, R. Ahlawat, K. O'Brien, J. Simonelli, K.-T. Teng, Y. Zhao. Control of Wafer Scanners: Methods and Developments. In 2020 American Control Conference, ACC 2020, Denver, CO, USA, July 1-3, 2020. pages 3686-3703, IEEE, 2020. [doi]
Abstract is missing.