Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner

Marcel Heertjes, Tim Tso. Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner. In American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007. pages 5490-5495, IEEE, 2007. [doi]

@inproceedings{HeertjesT07,
  title = {Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner},
  author = {Marcel Heertjes and Tim Tso},
  year = {2007},
  doi = {10.1109/ACC.2007.4282414},
  url = {https://doi.org/10.1109/ACC.2007.4282414},
  researchr = {https://researchr.org/publication/HeertjesT07},
  cites = {0},
  citedby = {0},
  pages = {5490-5495},
  booktitle = {American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007},
  publisher = {IEEE},
}