Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner - researchr publication

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Marcel Heertjes, Tim Tso. Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner. In American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007. pages 5490-5495, IEEE, 2007. [doi]

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