Hans Herdian, Takeshi Inoue, Takuichi Hirano, Masatsugu Sogabe, Atsushi Shirane, Kenichi Okada. Dual-Layer Proton Irradiation for Creating Thermally-Stable High-Resistivity Region in Si CMOS Substrate. In 51st IEEE European Solid-State Device Research Conference, ESSDERC 2021, Grenoble, France, September 13-22, 2021. pages 191-194, IEEE, 2021. [doi]
Abstract is missing.