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Capacitance measurements of an SOI based CMUT

Jonathan Hernandez, Tugrul Zure, Sazzadur Chowdhury. Capacitance measurements of an SOI based CMUT. In 4th IEEE Latin American Symposium on Circuits and Systems, LASCAS 2013, Cusco, Peru, February 27 - March 1, 2013. pages 1-4, IEEE, 2013. [doi]

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