Exploiting additional actuators and sensors for nano-positioning robust motion control

Robbert van Herpen, Tom Oomen, Edward Kikken, Marc van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch. Exploiting additional actuators and sensors for nano-positioning robust motion control. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 984-990, IEEE, 2014. [doi]

@inproceedings{HerpenOKWAS14,
  title = {Exploiting additional actuators and sensors for nano-positioning robust motion control},
  author = {Robbert van Herpen and Tom Oomen and Edward Kikken and Marc van de Wal and Wouter H. T. M. Aangenent and Maarten Steinbuch},
  year = {2014},
  doi = {10.1109/ACC.2014.6858927},
  url = {http://dx.doi.org/10.1109/ACC.2014.6858927},
  researchr = {https://researchr.org/publication/HerpenOKWAS14},
  cites = {0},
  citedby = {0},
  pages = {984-990},
  booktitle = {American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014},
  publisher = {IEEE},
  isbn = {978-1-4799-3272-6},
}