Robbert van Herpen, Tom Oomen, Edward Kikken, Marc van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch. Exploiting additional actuators and sensors for nano-positioning robust motion control. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 984-990, IEEE, 2014. [doi]
Abstract is missing.